Thermal Evaporator

Thermal Evaporator

Oerlikon Leybold UNIVEX 250

Location  

147 Stepan Chemistry Hall

Capabilities

  • Two shuttered thermal sources available for sequential deposition
  • High vacuum system with a 345 L/s turbopump
  • Front loading door
  • Swappable stage configuration. One stage is water cooled with rotation, and the other stage can tilt and rotate
  • Quartz crystal controller allows for automated deposition thickness control

Typical Use

  • Creation of thin metal films for:
    • Electronic devices
    • Solar cells
    • Sensors

Internal Hourly Rates

  • Unassisted: $22
  • Assisted: $79

External Hourly Rates

  • Unassisted: $37
  • Assisted: $99