Thermal Evaporator
Oerlikon Leybold UNIVEX 250
Location
147 Stepan Chemistry Hall
Capabilities
- Two shuttered thermal sources available for sequential deposition
- High vacuum system with a 345 L/s turbopump
- Front loading door
- Swappable stage configuration. One stage is water cooled with rotation, and the other stage can tilt and rotate
- Quartz crystal controller allows for automated deposition thickness control
Typical Use
- Creation of thin metal films for:
- Electronic devices
- Solar cells
- Sensors
Internal Hourly Rates
- Unassisted: $22
- Assisted: $80
External Hourly Rates
- Unassisted: $52
- Assisted: $134